Catalyst support substrate, method for growing carbon nanotubes using the same, and the transistor using carbon nanotubes
US7582507B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 28, 2003 |
| Grant date | Sep 1, 2009 |
| Priority date | — |
| Expiry date | Jul 31, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/75
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A catalyst supporting substrate includes a first region (54) which is formed on a substrate (50); and a second region (55) which is formed covering a part of the first region. The first region (54) includes a catalyst supporting portion (54a) containing a first material. The second region (55) includes a catalyst portion (55) containing a second material which is different from the first material. The first material includes a metal containing at least one of elements selected from the second group to the fourteenth group of the periodic table or a compound thereof. The second material is a catalyst which grows carbon nanotubes in a vapor phase.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.