Multi-photon polymerizable pre-ceramic polymeric compositions
US7582685B2 · kind B2 · utility
15Cited by
15References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2005 |
| Grant date | Sep 1, 2009 |
| Priority date | — |
| Expiry date | Oct 1, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0275
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A multi-photon reactive composition comprises an ethylenically unsaturated liquid polysilazane precursor, a multi-functional thiol additive, a multi-ethylenically-unsaturated additive different from the polysilazane, and a multi-photon photocuring composition. The invention can be used to provide ceramic-based microstructures as, for example, high temperature resistant materials, including devices such as microcombustors, micro-heat-exchangers, sensor and actuator systems, microfluidic devices, and micro-optics systems that can be used independently or integrated into other systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.