High-density probe array
US7583095B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 15, 2006 |
| Grant date | Sep 1, 2009 |
| Priority date | — |
| Expiry date | Jul 10, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49151
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe array may be fabricated by forming probes arranged on a sacrificial substrate, forming a probe substrate above the probes, and removing the sacrificial substrate. In one embodiment, first probes may be two-dimensionally formed in row and column directions on a sacrificial substrate. Second probes may be formed between the first probes arranged in the row direction such that a distance between the first and second probes is smaller than the resolution limit in a lithography process. A probe substrate may be formed on the sacrificial substrate having the first and second probes, and the sacrificial substrate may be removed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.