Laser etched fiducials in roll-roll display
US7583834B2 · kind B2 · utility
13Cited by
30References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2005 |
| Grant date | Sep 1, 2009 |
| Priority date | — |
| Expiry date | Sep 25, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7088
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a method of aligning comprising providing a support, applying a transparent layer, patterning at least the transparent layer to produce a pattern and an alignment feature capable of scattering light, illuminating the support and the transparent layer with oblique lighting, providing an analysis system capable of sensing scattered light from the alignment feature and referencing, sensing the scattered light from the alignment feature; referencing the scattered light from the alignment feature to a position on said support; and aligning a second operation to the position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.