Sensor with microelectro-mechanical oscillators
US7584649B2 · kind B2 · utility
3Cited by
8References
21Claims
0Family size
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Key dates
| Filing date | Jun 1, 2007 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Sep 14, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor is provided which is configured to detect the presence of multiple analytes, for example chemical or biological compounds, through the measurement of induced resonance shifts in a coupled array of microelectromechanical or micromechanical resonators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.