Patent · US Active

Sensor with microelectro-mechanical oscillators

US7584649B2 · kind B2 · utility

3Cited by
8References
21Claims
0Family size

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Key dates

Filing dateJun 1, 2007
Grant dateSep 8, 2009
Priority date
Expiry dateSep 14, 2027

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2291/0256
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sensor is provided which is configured to detect the presence of multiple analytes, for example chemical or biological compounds, through the measurement of induced resonance shifts in a coupled array of microelectromechanical or micromechanical resonators.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.