Pressure sensor for measuring blood pressure and method of fabricating the same
US7584666B2 · kind B2 · utility
15Cited by
17References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 3, 2008 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Jan 3, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A pressure sensor includes at least one cantilever formed on an upper surface of a silicon substrate, a piezoresistor formed on a fixed end of the cantilever, and a metal wire and an electrode pad connected to both ends of the piezoresistor, wherein a stopper that limits a deformation of a free end of the cantilever is formed below the cantilever.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.