Monitoring system for valve device
US7584668B2 · kind B2 · utility
3Cited by
7References
57Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 7, 2007 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Aug 7, 2027 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K37/0083
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monitoring system for valve device according to the present invention comprises a semiconductor single crystalline substrate including a bridged circuit and the bridged circuit comprising impurity-diffused resistors. The semiconductor single crystalline substrate is mounted to any of a valve device's valve stem, valve yoke, drive shaft, or elastic body disposed at the end of the drive shaft. Thrust and torque of the valve device are measured by the semiconductor single crystalline substrate and then the measured values are used for monitoring the valve device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.