Photo-detection device and method
US7586085B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 8, 2004 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | May 14, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probe 13 having a light shielding coating layer 33 formed for defining a light radiating aperture D or light radiated at a core 31 of the optical probe 13 is propagated, as the optical probe 13 is moved in a direction towards and away from a surface for measurement 2a. The core of the optical probe is coated with a light shielding coating layer 33. In this manner, a spot of propagated light propagated through the core 31 or a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement 2a, and light derived from the spot of light is detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.