Vacuum plasma generator

US7586099B2 · kind B2 · utility

Assignee

• HUETTINGER Elektronik GmbH + Co. KG · DE

Inventors

• Thorsten Eyhorn · Glückstadt, DE
• Moritz Nitschke · Glückstadt, DE
• Peter Wiedemuth · Herbolzheim, DE
• Gerhard Zahringer · Glückstadt, DE

Key dates

• Filing date: Mar 30, 2006
• Grant date: Sep 8, 2009
• Expiry date: Jul 11, 2026

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/46
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A vacuum plasma generator (VPG) includes an output connector for electrical connection of the VPG to at least one electrode of a plasma chamber. The VPG includes a mains connector for connection of the VPG to a mains power supply, a mains input filter coupled to the mains connector, a voltage converter coupled to the mains input filter for generating an output signal, a voltage converter control input for connection to a voltage converter control, a shield that surrounds at least the voltage converter, the mains power supply, and the mains input filter, and a connection device that provides an electrical connection between the shield and the plasma chamber.