Patent · US Expired

Power delivery control and balancing between multiple loads

US7586210B2 · kind B2 · utility

51Cited by

19References

21Claims

0Family size

Assignee

HUETTINGER Elektronik GmbH + Co. KG · DE

Inventors

Peter Wiedemuth · Herbolzheim, DE
Alfred Trusch · Breisach am Rhein, DE
Dieter Meier · Bad Nenndorf, DE
Gerhard Zaehringer · Glückstadt, DE

Key dates

Filing date	Aug 15, 2005
Grant date	Sep 8, 2009
Priority date	—
Expiry date	Apr 20, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG05F1/12
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A plasma process machine includes at least two electrodes disposed in a processing chamber and in contact with targets, an alternating current source connected to supply power to the electrodes, and a power delivery controller adapted to control power delivered by the alternating current source to the electrodes. The power delivery controller is configured to determine a control value from a comparison between actual power delivery as detected by a detector and a desired power delivery, and to adjust power delivery based on the control value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.