MEMS vibrating structure using a single-crystal piezoelectric thin film layer
US7586239B1 · kind B1 · utility
59Cited by
4References
27Claims
0Family size
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Key dates
| Filing date | Jun 6, 2008 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Jun 6, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/2442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure having dominant lateral vibrations supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer that has been grown with a specific crystal orientation. Since the MEMS vibrating structure has dominant lateral vibrations, its resonant frequency may be controlled by its size and shape, rather than layer thickness, which provides high accuracy and enables multiple resonators having different resonant frequencies on a single substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.