Acoustic wave device
US7586240B2 · kind B2 · utility
10Cited by
5References
9Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jan 23, 2008 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Jan 23, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/11
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device includes an acoustic wave element formed on a substrate, a first seal portion provided on the substrate so as to form a cavity above the acoustic wave element, and a second seal portion provided on the first seal portion, the first seal portion having a step so that the first seal portion has a width on a first side and another width on a second side arranged so that the first side is closer than the second side to the substrate, and the width on the first side is greater than the another width on the second side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.