Non-contact micro mirrors
US7586669B2 · kind B2 · utility
6Cited by
14References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 27, 2006 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Jan 19, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge is configured to produce an elastic restoring force on the mirror plate when the mirror plate is tilted away from an un-tilted position. The micro mirror device also includes a controller that can produce an electrostatic force to overcome the elastic restoring force to tilt the mirror plate from the un-tilted position to an “on” position or an “off” position. The electrostatic force can counter the elastic restoring force to hold the mirror plate at the “on” position or the “off” position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.