Method for discriminating anomaly in gas composition and discharge excitation type gas laser oscillator
US7586969B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2007 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Dec 11, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/134
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A discharge excitation type gas laser oscillator has a discharge excitation unit for exciting a laser gas by discharge in a discharge tube to generate induced emission of laser light, a high-frequency power supply unit for supplying power to the discharge tube, and a controller unit for controlling output current of the high-frequency power supply unit. The laser oscillator further has an output detecting section that detects actual current value of the high-frequency power supply unit supplying power to the discharge tube at an arbitrary pressure lower than the high pressure during the steady-state operation, at the start of the laser oscillator, after the laser gas begins discharge excitation at a pressure lower than the high pressure during steady-state operation, an output comparison section that compares the detected actual current value with a normal current value that has been detected when the gas composition of the laser gas is normal at the same pressure as the actual current value is detected; and a power supply control section that discriminates, if the difference between the actual current value and the normal current value is equal to or greater than a preset value, t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.