Method of fabricating porous aluminum oxide mold having sub-micron structure and methods of imprinting to make LEDS using the mold
US7588953B2 · kind B2 · utility
3Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2007 |
| Grant date | Sep 15, 2009 |
| Priority date | — |
| Expiry date | Feb 13, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/301
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An mold having a sub-micron, or even nano, structure is fabricated. The mold is a porous aluminum oxide mold. With the mold, a sub-micron pattern is easily imprinted on a large surface of a substrate or a LED. No expensive equipment is necessary. The fabricating process is fast and cheap and thus meets the needs of producers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.