Use of highly purified hydrocarbons in vacuum ultraviolet applications
US7589242B2 · kind B2 · utility
3Cited by
9References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2005 |
| Grant date | Sep 15, 2009 |
| Priority date | — |
| Expiry date | Sep 29, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/2041
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is drawn to the use of alkanes that are highly transparent to UV wavelengths ranging from about 170 nm to 260 nm in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography, particularly at 193 and 248 nm exposure wavelength.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.