Digital capacitive membrane transducer
US7589456B2 · kind B2 · utility
1Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2005 |
| Grant date | Sep 15, 2009 |
| Priority date | — |
| Expiry date | Apr 26, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/2417
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive membrane is used as a digital sensor. Membranes act as binary devices, such as being in a collapsed or non-collapsed state. By providing drum heads (membranes and associated gaps) with different response characteristics, the drum heads of an element digitally indicate the amplitude of the acoustic force by which of the drum heads are triggered or change states. The digital transducer may be used for different types of sensors, such as a CMUT, an air pressure, a temperature, a humidity, a chemical or biological stimulus or other sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.