Patent · US Expired

Micromechanical motion sensor

US7591179B2 · kind B2 · utility

3Cited by

4References

20Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Dietmar Krieg · Unterensingen, DE
Udo-Martin Gomez · Leonberg, DE
Reinhard Neul · Stuttgart, DE

Key dates

Filing date	Mar 24, 2004
Grant date	Sep 22, 2009
Priority date	—
Expiry date	Mar 24, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5776
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical motion sensor is capable of detecting a deflection imparted to an oscillatably mounted bar spring element excited to a permanent periodic oscillation by an electrostatic oscillating drive to which a periodic drive voltage is applied. To compensate non-linearities of the resonance frequency response of the bar spring element, a sum of a normal drive voltage signal and a compensation drive signal may be applied to a comb drive. In an alternative embodiment, separate compensation comb drive units may be additionally provided to the comb drive units used for the oscillation drive and a compensation voltage signal may be applied to them to compensate for the non-linearity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.