MEMS device comprising an actuator generating a hysteresis driving motion
US7592737B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 5, 2004 |
| Grant date | Sep 22, 2009 |
| Priority date | — |
| Expiry date | Mar 5, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG04C3/12
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A MEMS device is provided which includes a driven element having a series of teeth. The MEMS device includes a driving element operable to engage the driven element when the driving element is in a meshed position with the series of teeth. A driving actuator of the MEMS device is operable to (i) move the driving element with a hysteresis-type motion from an initial position into the meshed position to engage the driven element, (ii) move the driving element causing the driven element to move while the driving element is in the meshed position, (iii) move the driving element away from the meshed position, and (iv) cause the driving element to return to the initial position while the driving element is not in the meshed position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.