Tunable bulk acoustic wave MEMS micro-resonator
US7592739B2 · kind B2 · utility
12Cited by
4References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 11, 2003 |
| Grant date | Sep 22, 2009 |
| Priority date | — |
| Expiry date | Jul 18, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/241
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A suspended film bulk acoustic micro-resonator that includes a beam made of a piezoelectric material fixed to a support and sandwiched between excitation electrodes. The resonator also includes a mechanism modifying limiting conditions of the resonator composed of the excited beam to modify the micro-resonator resonant frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.