Method for evaluating reliance level of a virtual metrology system in product manufacturing
US7593912B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 2006 |
| Grant date | Sep 22, 2009 |
| Priority date | — |
| Expiry date | Dec 3, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B23/024
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method for evaluating reliance level of a virtual metrology system is disclosed. In this method, a reliance index (RI) and a RI threshold value are calculated by analyzing the process data of production equipment, thereby determining if the virtual metrology result is reliable. Besides, in this method, a global similarity index (GSI) and individual similarity indexes (ISI) are also provided for defining the degree of similarity between the current set of process data and all of the sets of historical process data used for establishing the conjecture model, thereby assisting the RI in gauging the degree of reliance and locating the key parameter(s) that cause major deviation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.