Humidity sensor and semiconductor device including the same
US7594435B2 · kind B2 · utility
5Cited by
5References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 17, 2007 |
| Grant date | Sep 29, 2009 |
| Priority date | — |
| Expiry date | May 24, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/223
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a humidity sensor whose electrode is set to have an island-like configuration and is enclosed by a humidity sensitive film. As a result, in the humidity sensor, adhesion property between the humidity sensitive films on the electrode is enhanced and thus high reliability is achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.