Chemical liquid apparatus and deaerating method
US7594801B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 6, 2002 |
| Grant date | Sep 29, 2009 |
| Priority date | — |
| Expiry date | May 17, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/422
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The amount of chemical liquids dispensed by a chemical liquid supply apparatus is stabilized and dispensing accuracy is remarkably improved. A pump discharges a liquid accommodated in a liquid tank. A filter is connected to the pump through a pump outlet flow path to which a pump discharge-side valve for opening/closing the flow path is provided. A dispensing nozzle (liquid dispense portion) is connected to the filter through a liquid discharge flow path to which a discharge valve for opening/closing the flow path is provided. A vacuum source communicates with the filter through an exhaust flow path to which a deaeration valve for opening/closing the flow path is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.