Anti- reflective device having an anti-reflection surface formed of silicon spikes with nano-tips
US7595477B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2006 |
| Grant date | Sep 29, 2009 |
| Priority date | — |
| Expiry date | Apr 2, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0018
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Described is a device having an anti-reflection surface. The device comprises a silicon substrate with a plurality of silicon spikes formed on the substrate. A first metallic layer is formed on the silicon spikes to form the anti-reflection surface. The device further includes an aperture that extends through the substrate. A second metallic layer is formed on the substrate. The second metallic layer includes a hole that is aligned with the aperture. A spacer is attached with the silicon substrate to provide a gap between an attached sensor apparatus. Therefore, operating as a Micro-sun sensor, light entering the hole passes through the aperture to be sensed by the sensor apparatus. Additionally, light reflected by the sensor apparatus toward the first side of the silicon substrate is absorbed by the first metallic layer and silicon spikes and is thereby prevented from being reflected back toward the sensor apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.