Patent · US Active

Scanning unit of an optical position measuring device and optical position measuring device

US7596880B2 · kind B2 · utility

5Cited by
9References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 7, 2006
Grant dateOct 6, 2009
Priority date
Expiry dateSep 11, 2027

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01D5/34769
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A scanning unit including a light source for illuminating a scale by a light beam and a detector for detecting the light beam which has been modulated by the scale as a function of a relative position between two objects. An inner chamber of the scanning unit in which the light beam extends is closed off in a dust-proof manner against an outer chamber, and the inner chamber is closed off by a transparent body, through which the light beam passes. The inner chamber is connected with the outer chamber via a filter which is dust-proof, but permeable to gas and vapor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.