Scanning unit of an optical position measuring device and optical position measuring device
US7596880B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2006 |
| Grant date | Oct 6, 2009 |
| Priority date | — |
| Expiry date | Sep 11, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/34769
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning unit including a light source for illuminating a scale by a light beam and a detector for detecting the light beam which has been modulated by the scale as a function of a relative position between two objects. An inner chamber of the scanning unit in which the light beam extends is closed off in a dust-proof manner against an outer chamber, and the inner chamber is closed off by a transparent body, through which the light beam passes. The inner chamber is connected with the outer chamber via a filter which is dust-proof, but permeable to gas and vapor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.