Method and apparatus for detecting resonance in electrostatically driven elements
US7598723B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2006 |
| Grant date | Oct 6, 2009 |
| Priority date | — |
| Expiry date | Feb 14, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and system is disclosed that can be used to directly detect and analyze an electric signal electrostatically induced a semi-conductive or conductive element at resonance. Through detection of the changes in the characteristics of the signal from the element, the disclosed devices can detect, for instance, presence of chemical/biological species in a sample or measure physical parameters of a sample such as pressure/acceleration, magnetic force, temperature, and/or extremely small masses. The disclosed systems include one or more micro- or nano-sized elements. Through modulation of an electric charge on a counter-electrode that is located at a pre-determined distance from the element, a modulating charge can be induced upon the element. Resonance can be directly detected via electronic monitoring of the induced signal for the higher harmonics of the natural resonant frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.