Triaxial membrane accelerometer
US7600428B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2007 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Mar 19, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to accelerometer structures micro-machined according to micro-electronics technologies. The accelerometer according to the invention comprises a substrate, an elastically deformable thin-layer membrane suspended above the substrate and secured to the substrate at its periphery, a proof mass suspended above the membrane and linked to the latter by a central stud, and capacitive interdigitated combs distributed about the mass, having movable plates secured to the mass and fixed plates secured to the substrate. The fixed plates and movable plates of the various combs are of differentiated heights to help in the discrimination of the upward and downward vertical accelerations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.