Pressure sensor with roughened and treated surface for improving adhesive strength and method of manufacturing the sensor

US7600433B2 · kind B2 · utility

Assignee

• Silicon Micro Sensors GmbH · DE

Inventors

• Jens Koehler · Thiendorf, DE
• Lars Petersen · Dresden, DE

Key dates

• Filing date: Feb 18, 2008
• Grant date: Oct 13, 2009
• Expiry date: Feb 18, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/147
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor comprises a housing, a housing socket and a pressure port which projects into the housing and which is made of a lead free material. The pressure sensor exhibits a pressure sensing element, which is adhesively cemented on the pressure port, so that a passage, located in the pressure port, is sealed on one side. In one region, the pressure port exhibits a surface roughness and is provided with an adhesion promoting coat. In this region, the pressure sensing element is connected by adhesive cement to the pressure port.