Electromigration tester for high capacity and high current
US7602205B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 19, 2008 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Feb 19, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2858
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electronic device under test (DUT) may be incorporated into a circuit having a voltage limiter connected in parallel with the DUT. The circuit includes a controlled current source having an output current connected in series with the DUT. The voltage limiter is characterized in that, when the output current is such that the voltage across the DUT (Vdut) would exceed a particular maximum voltage Vmax, without the voltage limiter in place, at least a portion of the output current flows through the voltage limiter, so as to limit Vdut to be less than or equal to Vmax. When the output current is such that Vdut would be less than or equal to Vmax, current does not flow through the voltage limiter. The circuit may include a plurality of DUTs, each DUT connected in series with the output current of a controlled current source, with a voltage limiter connected in parallel with each DUT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.