MEMS actuators and switches
US7602266B2 · kind B2 · utility
2Cited by
4References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2007 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | May 15, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2061/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.