Fluid counterbalance for a laser lens used to scribe an electronic component substrate
US7602562B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 21, 2007 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Jun 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/08
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus and method for supporting a device for processing an electronic component substrate includes an assembly supporting a laser lens in a gravity field for focusing movement along a Z-axis by a linear actuator. A fluid counterbalance for the assembly is defined by a piston associated with a housing for movement between end limits of travel. The piston divides the housing into first and second fluid chambers having first and second fluid communication ports. A fluid pressure source is connectable to the first and second chambers through the first and second fluid communication ports. The fluid pressure source is adjustable to statically suspend the supported laser lens in equilibrium within the gravity field. The fluid pressure source permits movement of the supported laser lens to any position between opposite end limits of travel of the piston, while maintaining the mass of the supported laser lens in equilibrium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.