Air bearing assembly for guiding motion of optical components of a laser processing system
US7603785B2 · kind B2 · utility
3Cited by
5References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 20, 2007 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | Apr 27, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S33/21
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A rigid support structure allows for faster and more accurate positioning of axially adjustable optical components in a laser processing system. Vibrational and thermal stability is improved when an optics assembly is housed in a rigid air bearing sleeve that is mounted to a support structure above a specimen stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.