Deformable mirror device and apparatus for observing retina of eye
US7604353B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 18, 2007 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | Dec 18, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
It is made possible to improve the variations in the “generated force (load)—deflection characteristics”. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.