Polymer-assisted deposition of films
US7604839B2 · kind B2 · utility
2Cited by
17References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2004 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | Jan 23, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C18/1279
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A polymer assisted deposition process for deposition of metal oxide films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures to yield metal oxide films and the like. Such films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.