Patent · US Active

On-chip reflectron and ion optics

US7605377B2 · kind B2 · utility

4Cited by

90References

18Claims

0Family size

Assignee

Zyvex Corporation · US

Inventors

Guido Fridolin Verbeck, IV · Lewisville, US
Kenneth Tsui · Richardson, US

Key dates

Filing date	Oct 17, 2006
Grant date	Oct 20, 2009
Priority date	—
Expiry date	Dec 11, 2027

Classification

Technology area (CPC H)Electricity
CPC primaryH01J49/406
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A microelectronics apparatus comprising a substrate, a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate, and a plurality of ion reflection lenses each coupled to the substrate, wherein each ion reflection lens: (1) is substantially perpendicular to each of the grid electrodes; (2) extends substantially perpendicular from the substrate; and (3) has an aperture aligned with the central axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.