Probe card, apparatus and method for inspecting an object
US7605596B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2006 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | Aug 28, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2879
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card, an apparatus and a method of inspecting an object. In the example method, a first inspection current may be divided into a plurality of first divided inspection currents. Each of the first divided inspection currents may be supplied to a different one of a plurality of first chips. A second inspection current may be selectively applied to a second chip other than the first plurality of chips. In an example, the second inspection current may be substantially equal to at least one of the plurality of first divided inspection currents. In a further example, the example probe card and/or the apparatus may perform the example method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.