Patent · US Active

Transformer for impedance-matching power output of RF amplifier to gas-laser discharge

US7605673B2 · kind B2 · utility

9Cited by
11References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 23, 2007
Grant dateOct 20, 2009
Priority date
Expiry dateAug 1, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K1/165
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

An RF impedance-matching transformer for matching the output impedance of an RF amplifier to the discharge of a gas-discharge laser includes upper and lower dielectric plates arranged face-to-face and bonded together. A primary U-shaped strip winding is embedded in the bonded surface of one of the dielectric plates. A secondary strip-winding is formed on an exposed surface of the upper dielectric plates. A ground-plane electrode formed on an exposed surface of the lower dielectric plate. An electrical connector connects one end of the secondary strip-winding to the ground-plane electrode via a via-hole extending through the dielectric plates. The other end of the secondary strip-winding can be connected to the laser.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.