Apparatus and method for single-sided loading of a furnace or other process station
US7607321B2 · kind B2 · utility
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2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2004 |
| Grant date | Oct 27, 2009 |
| Priority date | — |
| Expiry date | Sep 21, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27B17/02
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
Solutions permit or facilitate faster and/or easier processing involving loading or unloading of a work module into a process station. For example, the work module may be a processing tube or the like and the process station may be a heating station such as a tube furnace or the like. In one embodiment, the loading is from a single side of a process station. In one embodiment, the work module includes inlets and outlets for fluid flow, with both inlets and outlets being closer toward one side of the work module than the other side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.