Patent · US Active

Factory-alignable compact cantilever probe

US7607344B2 · kind B2 · utility

0Cited by
31References
20Claims
0Family size

Inventor

Key dates

Filing dateApr 23, 2007
Grant dateOct 27, 2009
Priority date—
Expiry dateOct 12, 2027

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q60/38
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A scanner which includes a gradient index lens for passing and focusing beams from a radiation emitter to a cantilevered member reflective surface of a probe and from the reflective surface to a radiation detector. The lens also serves as a mechanical support for attachment of the radiation emitter and the radiation detector and is also attached to a support for the cantilevered member. The resulting fixed positions of the radiation emitter and the radiation detector relative to the reflective cantilevered member surface allows the scanner to be compact and factory focally alignable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.