Plasma generating electrode and plasma reactor
US7608796B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 27, 2006 |
| Grant date | Oct 27, 2009 |
| Priority date | — |
| Expiry date | Nov 28, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2259/818
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A plasma generating electrode capable of generating plasma with a high energy level by using a small amount of electric power is provided. The plasma generating electrode includes at least a pair of unit electrodes including a unit electrode as an anode and a unit electrode as a cathode, and can generate plasma by applying voltage, the unit electrode as an anode and the unit electrode as a cathode being disposed facing each other, and at least the unit electrode as an anode having a plate-like ceramic dielectric and a conductive film disposed in the ceramic dielectric, wherein the unit electrode as a cathode can emit secondary electrons in a number five times or greater than the number of cations (primary particles) which it receives when the cations produced in the process of plasma generation collide therewith.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.