Patent · US Active

Methods and systems for decreasing the effective pulse repetition of a laser

US7608800B2 · kind B2 · utility

1Cited by
10References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 5, 2007
Grant dateOct 27, 2009
Priority date
Expiry dateJun 5, 2027

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB23K2101/40
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A method selectively processes structures on a workpiece with laser pulses. The structures are arranged in a linear pattern having approximately equal pitch. The pulses propagate along a laser beam propagation path terminating at a laser beam spot on the workpiece. The method fires a first processing pulse when the spot coincides with a first structure location, selectively blocks or clears the propagation path during the first pulse, moves the workpiece and the spot relative to one another such that the spot moves toward a second structure location at a speed less than the product of the laser's PRF and the pitch, fires a dummy pulse before the spot reaches the second structure location, blocks the propagation path during the dummy laser pulse, fires another processing pulse when the beam spot coincides with the second structure location, and selectively blocks or clears the propagation path during the second processing pulse.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.