Method and apparatus for scanning a workpiece through an ion beam
US7608843B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2006 |
| Grant date | Oct 27, 2009 |
| Priority date | — |
| Expiry date | Apr 23, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31701
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus 300 for better controlling scanning of a workpiece 330 through an ion beam path 306 provide for mounting a workpiece 330 on an elongated member, partially repetitively rotating the elongated member 500 around a point of rotation 368 to make repetitive scans of the workpiece 330 along and arcuate path 504 and bending the elongated member 500 at a joint 322 to move the one and out of the ion beam path 306 to facilitate attachment and removal of individual workpieces 330. A motor 315 used for the rotating may be suspended within a partial vacuum enclosure 304 against gravity for raising and lowering the elongated member and 500 a workpiece 306 for linear vertical scanning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.