Slot waveguide structure
US7609932B1 · kind B1 · utility
3Cited by
10References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 6, 2006 |
| Grant date | Oct 27, 2009 |
| Priority date | — |
| Expiry date | May 27, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/353
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A nanometer slot waveguide includes a nanometer slot waveguide structure with vertically stacked layers. The vertically stacked layers include a substrate, a first waveguide layer defining a first rail, a spacer layer defining a slot, and a second waveguide layer defining a second rail.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.