Method and system for sensing differential pressure with elastomer
US7610811B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2008 |
| Grant date | Nov 3, 2009 |
| Priority date | — |
| Expiry date | Oct 13, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0058
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A differential pressure sensor method and system includes a number of elastomer plates, which can be placed with certain distance and sealed in a small tube, wherein the tube can be connected to a number of detection areas. The surface of the elastomers can be covered with a thin film of conductive elastomer as a compliant electrode. The resistance of the compliant electrodes varies with deformation of the elastomer plates and the resistance change can be measured through circuits. A variable capacitor also exists between the elastomer plates due to a sealed space and the compliant electrodes. The elastomer plates deform accordingly when the pressure varies in the detection areas and the variation of the capacitance can be detected through circuits. The pressure difference between the detection areas can then be detected utilizing the variation in resistance and capacitance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.