Testing of samples
US7610815B2 · kind B2 · utility
1Cited by
21References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 24, 2006 |
| Grant date | Nov 3, 2009 |
| Priority date | — |
| Expiry date | Apr 24, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0647
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of monitoring the surface of a sample under test is provided and the method comprises the steps of: illuminating the surface with light (20) polarised in a first direction; viewing light reflected from the surface through a polarising filter (27) arranged at 90° to the first direction, wherein the surface of the sample under test is provided with a marked area where diffuse reflection of the incident polarised light will occur in order to improve the contrast between the marked area and the surface of the sample under text.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.