Waveguides in integrated circuits
US7612638B2 · kind B2 · utility
33Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2006 |
| Grant date | Nov 3, 2009 |
| Priority date | — |
| Expiry date | Apr 9, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A waveguide in semiconductor integrated circuit is disclosed, the waveguide comprises a horizontal first metal plate, a horizontal second metal plate above the first metal plate, separated by an insulation material, and a plurality of metal vias positioned in two parallel lines, running vertically through the insulation material in contacts with both the first and second metal plates, wherein the first and second metal plates and the plurality of metal vias form a metal enclosure in a cross-sectional view that can serve as a waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.