Microelectromechanical device with optical function separated from mechanical and electrical function

US7612932B2 · kind B2 · utility

Assignee

• ID&C LIMITED · US

Inventors

• Clarence Chui · San Jose, US
• Denis Endisch · Cupertino, US
• Lior Kogut · Haifa, IL
• Ming-Hau Tung · San Francisco, US
• Yeh-Jiun Tung · Princeton, US
• Chih-Wei Chiang · Baoshan, TW

Key dates

• Filing date: Jul 2, 2007
• Grant date: Nov 3, 2009
• Expiry date: Sep 3, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/42
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.