Patent · US Active

Diaphragm pressure measuring cell arrangement

US7614308B2 · kind B2 · utility

9Cited by

8References

22Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Walter Berner · Stuttgart, DE
Jarkko Antila · Helsinki, FI
Gaetan Duplain · Keyano, CA
Per Bjorkman · Wittenberge, DE
Tove Manselin · Ascheberg, DE
Oskar Untermarzoner · Ruggell, LI

Key dates

Filing date	Dec 4, 2008
Grant date	Nov 10, 2009
Priority date	—
Expiry date	Dec 4, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01L19/147
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.