Device for controlling the frequency of resonance of an oscillating micro-electromechanical system
US7616078B2 · kind B2 · utility
29Cited by
10References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2007 |
| Grant date | Nov 10, 2009 |
| Priority date | — |
| Expiry date | Sep 28, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for controlling the frequency of resonance of an oscillating micro-electromechanical system includes: a microstructure, having a first body and a second body, which is capacitively coupled to the first body and elastically oscillatable with respect thereto at a calibratable frequency of resonance, a relative displacement between the second body and the first body being detectable from outside; and an amplifier coupled to the microstructure for detecting the relative displacement. DC decoupling elements are arranged between the amplifier and the microstructure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.