Variable reluctance fast positioning system and methods
US7616084B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2004 |
| Grant date | Nov 10, 2009 |
| Priority date | — |
| Expiry date | Jul 19, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T82/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The preferred embodiments of the present invention are directed to high bandwidth positioning systems such as fast tool servos (FTS). The applications of this invention include, for example, diamond turning of mold with structured surface for mass production of films for brightness enhancement and controlled reflectivity, diamond turning of molds for contact lens and micro-optical positioning devices.Preferred embodiments of the fast tool servo can have a closed-loop bandwidth of approximately 20±5 kHz, with acceleration of up to approximately 1000 G or more. The resolution or position error is approximately 1 nm root mean square (RMS). In a preferred embodiment, the full stroke of 50 μm can be achieved up to 1 kHz operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.